NY 869583
Dec. 20, 1991
CLA-2-84:S:N:N1:103 869583
Mr. James P. Davis
Unac Technologies, Inc.
23 Esquire Road
North Billerica, MA 01862
RE: The tariff classification of a tungsten deposition system
from Japan
Dear Mr. Davis:
In your letter dated December 4, 1991 you requested a tariff
classification ruling.
The ERA-2000 is a chemical vapor deposition system used by
semiconductor manufacturers to selectively deposit tungsten
layers onto silicon wafers. It basically consists of a main
deposition unit, vacuum system, and control cabinet. The main
unit incorporates separate alloy aluminum pre-treatment and
deposition chambers to minimize cross-contamination of process
gases, a load/unload chamber, buffer chamber, and gas delivery
system. A secondary transport handler transfers wafers into
cassettes and forwards the wafers to a centering stage. In the
pre-treatment chamber the wafer undergoes a proprietary
etch/anneal process which conditions the substrate for
deposition. The wafer is then transported via a primary wafer
transfer unit into the deposition chamber where infra-red heating
and actual deposition under high vacuum conditions occur. The
deposition chamber also features a plasma cleaning capability.
The vacuum system consists of four cryogenic (high vacuum)
turbomolecular pumps housed in the main unit and three dry (low
- medium vacuum) pumps housed in separate cabinets. The control
cabinet utilizes a microprocessor and a touch screen to control
all setup and deposition parameters, such as temperature, vacuum,
and gas delivery, as well as maintenance and error logging.
The applicable subheading for the ERA-2000 tungsten chemical
vapor deposition system will be 8479.89.9076, Harmonized Tariff
Schedule of the United States (HTS), which provides for machines
for production and assembly of diodes, transistors and similar
semiconductor devices and electronic integrated circuits:
chemical vapor deposition (CVD) apparatus including low pressure
and plasma enhanced systems. The rate of duty will be 3.7
percent ad valorem.
You also requested a classification ruling on the vacuum and
control cabinet subsystems when separately imported. The
applicable subheading for the vacuum subsystem, composed of a dry
pump and its associated piping and electrical connectors housed
in a cabinet, will be 8414.10.0000, HTS, which provides for
vacuum pumps. The rate of duty will be 3.7 percent ad valorem.
The applicable subheading for the control cabinet will be
9032.89.6030, HTS, which provides for other automatic regulating
or controlling instruments and apparatus: process control
instruments and apparatus: complete systems. The rate of duty
will be 4.9 percent ad valorem.
This ruling is being issued under the provisions of Section
177 of the Customs Regulations (19 C.F.R. 177).
A copy of this ruling letter should be attached to the entry
documents filed at the time this merchandise is imported. If the
documents have been filed without a copy, this ruling should be
brought to the attention of the Customs officer handling the
transaction.
Sincerely,
Jean F. Maguire
Area Director
New York Seaport