CLA-2-90:S:N:N1:104 874114
Ms. Deborah A. Gross
North American Philips Corp.
100 East 42nd Street
New York, NY 10017-5699
RE: The tariff classification of a total reflection x-ray
fluorescence instrument from Japan.
Dear Ms. Gross:
In your letter dated April 30, 1992 on behalf of Philips
Electronic Instruments Company of Mahwah, N.J. you requested a
tariff classification ruling.
The TREX 610 Total Reflection X-Ray Fluorescence Instrument
is a measurement system for semiconductor wafers. The technique
uses x-rays incident at a grazing angle to achieve total external
reflection of the x-ray beam. Automated analysis of suspected
contaminants on the entire wafer surface or only over areas of
specific interest can be performed. Analysis depth from 3 nm to
approximately 1 micron can be controlled by varying the glancing
angle of the x-ray beam. The TREX 610 consists of a rotating
anode x-ray source, x-ray monochromator, Si(Li) detector with an
effective area of 80 square mm, analytical chamber under vacuum,
sample cassettes (1 each containing 4", 5", 6" and 8" wafers),
controlling electronics, and a computer for data acquisition,
analysis and output.
The applicable subheading for the TREX 610 will be
9022.19.0000, Harmonized Tariff Schedule of the United States
(HTS), which provides for apparatus based on the use of x-rays,
other than for medical, surgical, dental or veterinary uses. The
rate of duty will be 2.1 percent ad valorem.
This ruling is being issued under the provisions of Section
177 of the Customs Regulations (19 C.F.R. 177).
A copy of this ruling letter should be attached to the entry
documents filed at the time this merchandise is imported. If the
documents have been filed without a copy, this ruling should be
brought to the attention of the Customs officer handling the
transaction.
Sincerely,
Jean F. Maguire
Area Director
New York Seaport