Regulations last checked for updates: Feb 21, 2025

Title 40 - Protection of Environment last revised: Nov 21, 2025
All TitlesTitle 40Chapter IPart 98Subpart IAppendix - Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
View all text of [None - None]
Appendix - Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Product type Emission factors EFi
CF4 C2F6 CHF3 c-C4F8 C3F8 NF3 SF6 N2O
Semiconductors (kg/m 2)0.91.00.04NA0.050.040.20NA
LCD (g/m 2)0.65NA0.00240.00NA1.294.1417.06
MEMS (kg/m 2)0.015NANA0.076NANA1.86NA

Notes: NA denotes not applicable based on currently available information.

[89 FR 31919, Apr. 25, 2024]
authority: 42 U.S.C. 7401-7671q.
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.
© 2014 CustomsMobile | Disclaimer | Privacy | About