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Regulations last checked for updates: Nov 25, 2024
Title 40 - Protection of Environment last revised: Nov 21, 2024
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Title 40
Chapter I
Part 98
Subpart I
Appendix - Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
View all text of [None - None]
Appendix - Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
Link to an amendment published at 89 FR 31919, Apr. 25, 2024.
Product type
Fluorinated GHGs and fluorinated heat transfer fluids used during manufacture
Electronics
CF
4
, C
2
F
6
, C
3
F
8
, c-C
4
F
8
, c-C
4
F
8
O, C
4
F
6
, C
5
F
8
, CHF
3
, CH
2
F
2
, NF
3
, SF
6
, and fluorinated HTFs (CF
3
-(O-CF(CF
3
)-CF
2
)
n
-(O-CF
2
)
m
-O-CF
3
, C
n
F
2n + 2
, C
n
F
2n + 1
(O)C
m
F
2m + 1
, C
n
F
2
.O, (C
n
F
2n + 1
)
3N
).
[77 FR 10381, Feb. 22, 2012]
authority:
42 U.S.C. 7401-7671q.
source:
74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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