Code of Federal Regulations > Title 40 > Chapter I > Part 98 > Subpart I > Appendix - Table I-11 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

Regulations last checked for updates: Feb 21, 2025

Title 40 - Protection of Environment last revised: Nov 21, 2025

Appendix - Table I-11 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

Table I-11 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method

[150 mm and 200 mm Wafers]

All processes	Process gas i
All processes	CF4	C2F6	CHF3	CH2F2	C2HF5	CH3F	C3F8	C4F8	NF3	NF3 Remote	SF6	C4F6	C5F8	C4F8O
1-Ui	0.79	0.55	0.51	0.13	0.064	0.70	0.40	0.12	0.18	0.028	0.58	0.083	0.072	0.14
BCF4	NA	0.19	0.085	0.079	0.077	NA	0.20	0.11	0.11	0.015	0.13	0.095	NA	0.13
BC2F6	0.027	NA	0.035	0.025	0.024	0.0034	NA	0.019	0.0059	NA	0.10	0.073	0.014	0.045
BC4F8	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA
BC3F8	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA
BC5F8	0.00077	NA	0.0012	NA	NA	NA	NA	0.0043	NA	NA	NA	NA	NA	NA
BCHF3	0.060	0.0020	NA	0.049	NA	NA	NA	0.020	NA	NA	0.0011	0.066	0.0039	NA
BF2	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.50	NA	NA	NA	NA

Notes: NA = Not applicable; i.e., there are no applicable emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[89 FR 31921, Apr. 25, 2024]

authority: 42 U.S.C. 7401-7671q.

source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.