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Regulations last checked for updates: Feb 21, 2025
Title 40 - Protection of Environment last revised: Nov 21, 2025
All Titles
Title 40
Chapter I
Part 98
Subpart I
Appendix - Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
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Appendix - Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
Table I-21 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry
Product type
Fluorinated GHGs used during manufacture
Electronics
CF
4
, C
2
F
6
, C
3
F
8
, c-C
4
F
8
, c-C
4
F
8
O, C
4
F
6
, C
5
F
8
, CHF
3
, CH
2
F
2
, NF
3
, SF
6
, and fluorinated HTFs (CF
3
-(O-CF(CF
3
)-CF
2
)n-(O-CF
2
)m-O-CF
3
, C
n
F
2n+2
, C
n
F
2n+1
(O)C
m
F
2m+1
, C
n
F
2n
O, (C
n
F
2n+1
)
3N
).
[89 FR 31924, Apr. 25, 2024.]
authority:
42 U.S.C. 7401-7671q.
source:
74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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