Regulations last checked for updates: Nov 25, 2024

Title 40 - Protection of Environment last revised: Nov 21, 2024
All TitlesTitle 40Chapter IPart 98Subpart IAppendix - Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing
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Appendix - Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing
Process type factors Process gas i
CF4 C2F6 CHF3 CH2F2 C3F8 c− C4F8 NF3
Remote 		NF3 SF6
Etch 1-Ui0.6NA0.2NANA0.1NANA0.3
Etch BCF4NANA0.07NANA0.009NANANA
Etch BCHF3NANANANANA0.02NANANA
Etch BC2F4NANA0.05NANANANANANA
CVD Chamber Cleaning 1-UiNANANANANANA0.030.30.9

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]
authority: 42 U.S.C. 7401-7671q.
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.
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