Code of Federal Regulations > Title 40 > Chapter I > Part 98 > Subpart I > Appendix - Table I-7 To Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing

Regulations last checked for updates: Nov 25, 2024

Title 40 - Protection of Environment last revised: Nov 21, 2024

Appendix - Table I-7 To Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing

Process type factors	Process gas i
Process type factors	CF4	C2F6	CHF3	CH2F2	C3F8	c− C4F8	NF3 Remote	NF3	SF6
Etch 1-Ui	0.7	0.4	0.4	NA	NA	0.2	NA	NA	0.4
Etch BCF4	NA	0.2	NA	NA	NA	0.1	NA	NA	NA
Etch BC2F6	NA	NA	NA	NA	NA	0.1	NA	NA	NA
CVD Chamber Cleaning 1-Ui	NA	0.6	NA	NA	0.1	0.1	NA	0.3	0.4
CVD Chamber Cleaning BCF4	NA	0.2	NA	NA	0.2	0.1	NA	NA	NA

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]

authority: 42 U.S.C. 7401-7671q.

source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.