Regulations last checked for updates: Feb 21, 2025

Title 40 - Protection of Environment last revised: Nov 21, 2025
Appendix - Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O,j) for N2O Utilization (UN2O,j)

Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O,j) for N2O Utilization (UN2O,j)

Manufacturing type/process type/wafer size N2O
Semiconductor Manufacturing:
200 mm or Less:
CVD 1-Ui1.0
Other Manufacturing Process 1-Ui1.0
300 mm or greater:
CVD 1-Ui0.5
Other Manufacturing Process 1-Ui1.0
LCD Manufacturing:
CVD Thin Film Manufacturing 1-Ui0.63
All other N2O Processes1.0
[89 FR 31921, Apr. 25, 2024]
source: 74 FR 56374, Oct. 30, 2009, unless otherwise noted.